HEAVY-ION MICROPROBES AND THEIR APPLICATIONS

被引：0

作者：

TAKAI, M

HORINO, Y

MOKUNO, Y

CHAYAHARA, A

KIUCHI, M

FUJII, K

SATOU, M

机构：

[1] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

[2] GOVT IND RES INST,IKEDA,OSAKA 563,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Nuclear microprobes with heavy ions have considerable advantage over light ion microprobes. Features of heavy ion microprobes such as larger scattering cross section and larger stopping power than those for light ion microprobes, and capability of in-situ localized modification and simulating single event upsets in both microelectronic circuits and biological specimens, are discussed in comparison with light ion microprobes. Some of the recent installations of heavy ion microprobes and their applications are also reviewed.

引用

页码：8 / 16

页数：9

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