SPREADING OF ULTRATHIN LIQUID LUBRICANT FILMS ON PATTERNED SURFACES

被引:0
|
作者
MATE, CM [1 ]
LORENZ, MR [1 ]
DELINE, VR [1 ]
HUSSLA, I [1 ]
PHILPOTT, MR [1 ]
COBURN, JW [1 ]
机构
[1] IBM CORP,DIV RES,ALMADEN RES CTR,SAN JOSE,CA 95120
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中图分类号
O6 [化学];
学科分类号
0703 ;
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页码:178 / COLL
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