CONTRIBUTION OF DIFFUSION-INDUCED STRUCTURAL-CHANGES TO THE ANISOTROPY OF THE PHOSPHORUS DIFFUSION IN SILICON

被引：0
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作者：
BOGDANOV, EI
LARIKOV, LN
MAKSIMENKO, EA
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来源：
UKRAINSKII FIZICHESKII ZHURNAL | 1990年 / 35卷 / 01期
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O4 [物理学];
学科分类号：
0702 ;
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页码：87 / 89
页数：3
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