VUV SOURCE FOR PHOTOCHEMICAL DEPOSITION OF THIN DIELECTRIC FILMS

被引：0
|
作者：
NISSIM, YI [1 ]
FLICSTEIN, J [1 ]
VITEL, Y [1 ]
DULAC, O [1 ]
DEBAUCHE, C [1 ]
LICOPPE, C [1 ]
机构：
[1] UNIV PARIS 06,PHYS PLASMAS DENSES LAB,F-75252 PARIS 05,FRANCE
来源：
ANNALES DE PHYSIQUE | 1994年 / 19卷 / 05期
关键词：
D O I：
10.1051/anphys/1994054
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：229 / 236
页数：8
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