SPECTROSCOPY OF PLASMAS FOR SURFACE-TREATMENT

被引：0
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作者：
RICARD, A
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1986年 / 41卷 / 230期
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
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页码：13 / 26
页数：14
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