MEASUREMENT OF BEAM ENERGY-SPECTRUM AND IMPURITY CONTENT IN HIGH-POWER NEUTRAL BEAM INJECTORS

被引：3
|
作者：
LANGLEY, RA [1 ]
RYAN, PM [1 ]
TSAI, CC [1 ]
MENON, MM [1 ]
BOTNICK, EM [1 ]
MAGEE, CW [1 ]
机构：
[1] RCA LABS,PRINCETON,NJ 08540
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.573123
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1085 / 1088
页数：4
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