MOVPE GROWTH OF SELECTIVELY DOPED ALGAAS GAAS HETEROSTRUCTURES WITH TERTIARYBUTYLARSINE

被引：13
|
作者：
TANAKA, H
KIKKAWA, T
KASAI, K
KOMENO, J
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1989年 / 28卷 / 06期
关键词：
D O I：
10.1143/JJAP.28.L901
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L901 / L903
页数：3
相关论文
共 50 条
  • [1] MOVPE growth of selectively doped AlGaAs/GaAs heterostructures with tertiarybutylarsine
    Tanaka, Hitoshi, 1600, (28):
  • [2] MOVPE growth of AlGaAs/GaAs heterostructures for HEMT LSI
    Itoh, Hiromi, 1693, (28):
  • [3] MOVPE GROWTH OF ALGAAS/GAAS HETEROSTRUCTURES FOR HEMT LSI
    ITOH, H
    TANAKA, H
    OHORI, T
    KASAI, K
    MITANI, E
    SUZUKI, M
    KOMENO, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (10): : L1693 - L1695
  • [4] PHOTOREFLECTANCE OF SELECTIVELY DOPED N-ALGAAS/GAAS HETEROSTRUCTURES
    TANG, YS
    XU, YW
    JIANG, DS
    ZHUANG, WH
    KONG, MY
    SUPERLATTICES AND MICROSTRUCTURES, 1989, 6 (04) : 391 - 393
  • [5] MOVPE GROWTH OF HIGH-QUALITY SELECTIVELY DOPED N-INGAP GAAS HETEROSTRUCTURES
    TAKECHI, M
    OHORI, T
    TAKIKAWA, M
    KOMENO, J
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (09) : C452 - C452
  • [6] Advanced AlGaAs/GaAs Heterostructures Grown by MOVPE
    Ladugin, Maxim A.
    Yarotskaya, Irina, V
    Bagaev, Timur A.
    Telegin, Konstantin Yu
    Andreev, Andrey Yu
    Zasavitskii, Ivan I.
    Padalitsa, Anatoliy A.
    Marmalyuk, Alexander A.
    CRYSTALS, 2019, 9 (06):
  • [7] ELECTRON CONCENTRATIONS AND MOBILITIES IN SELECTIVELY DOPED ALGAAS-GAAS-ALGAAS DOUBLE HETEROSTRUCTURES
    BURKHARD, H
    SCHLAPP, W
    WEIMANN, G
    SURFACE SCIENCE, 1986, 174 (1-3) : 387 - 391
  • [8] THE GROWTH OF GAAS, ALGAAS, AND SELECTIVELY DOPED ALGAAS/GAAS HETEROSTRUCTURES BY METALORGANIC VAPOR-PHASE EPITAXY USING TERTIARY-BUTYLARSINE
    KIKKAWA, T
    TANAKA, H
    KOMENO, J
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (12) : 7576 - 7582
  • [9] MOCVD Growth of Doped GaAs/AlGaAs Quantum Heterostructures
    任红文
    徐现刚
    黄柏标
    刘士文
    蒋民华
    RareMetals, 1993, (01) : 25 - 29
  • [10] LARGE-AREA MOVPE GROWTH OF ALGAAS/GAAS HETEROSTRUCTURES FOR HEMT LSIS
    TANAKA, H
    TOMESAKAI, N
    ITOH, H
    OHORI, T
    MAKIYAMA, K
    OKABE, T
    TAKIKAWA, M
    KASAI, K
    KOMENO, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (01): : L10 - L12
12345