PREPARATION AND PROPERTIES OF III-V NITRIDE THIN-FILMS

被引：177
|
作者：
KUBOTA, K
KOBAYASHI, Y
FUJIMOTO, K
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 07期
关键词：
D O I：
10.1063/1.344181
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：2984 / 2988
页数：5
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