PAPERS FROM THE 6TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE - 12-15 JULY 1993 NEWPORT, RHODE-ISLAND - PREFACE

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HOLLIS, MA

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 02期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：628 / 628

页数：1

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