DIFFERENCES BETWEEN LAB6 AND CEB6 BY MEANS OF SPECTROSCOPIC ELLIPSOMETRY

被引：24
|
作者：
VANDERHEIDE, PAM
TENCATE, HW
TENDAM, LM
DEGROOT, RA
DEVROOMEN, AR
机构：
来源：
JOURNAL OF PHYSICS F-METAL PHYSICS | 1986年 / 16卷 / 10期
关键词：
D O I：
10.1088/0305-4608/16/10/026
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1617 / 1623
页数：7
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