ON THE DEVELOPMENT OF A WDX-PIXE MEASUREMENT SYSTEM AND ITS APPLICATION

We have combined a high-energy ion beam analysis system with a wavelength dispersive X-ray spectrometer PIXE (WDX-PIXE). This system consists of a WDX-PIXE with crystal spectrometers, a conventional energy dispersive X-ray spectrometer PIXE (EDX-PIXE) with a semiconductor detector, and RBS/channeling measurement equipment. The WDX-PIXE method has two advantages. At first, energy resolution by WDX-PIXE is much better than that by EDX-PIXE. Therefore, we can apply it to chemical-state analysis of specimen. Secondly, by using the WDX-PIXE, we can efficiently detect low energy X-rays of light elements (i.e. B, C, N, O, ...), which cannot be measured by EDX-PIXE. Preliminary results of standard samples and a typical application of chemical-state analysis with the WDX-PIXE are reported.