POWER-SUPPLY FOR SPUTTERING CELLS

被引：0

作者：

DICK, IR ^{[1
]}

机构：

[1] CSIRO,DIV CHEM PHYS,CLAYTON 3168,VICTORIA,AUSTRALIA

来源：

AUSTRALIAN JOURNAL OF INSTRUMENTATION & CONTROL | 1976年 / 32卷 / 05期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：97 / 98

页数：2

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