MEASUREMENT OF DIFFERENTIAL SPUTTERING YIELDS BY LASER FLUORESCENCE SPECTROSCOPY

被引：3

作者：

MATSUDA, Y

YAMAGUCHI, K

KAJIWARA, T

MURAOKA, K

AKAZAKI, M

HONDA, C

OKADA, T

MAEDA, M

YAMAMURA, Y

KAWATOH, E

FUJITA, J

机构：

[1] KYUSHU UNIV,DEPT ELECT ENGN,FUKUOKA 812,JAPAN

[2] OKAYAMA UNIV SCI,DEPT APPL PHYS,OKAYAMA 700,JAPAN

[3] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

[4] NAGOYA UNIV,INST PLASMA PHYS,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(88)90618-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：511 / 514

页数：4

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