MEASUREMENT OF DIFFERENTIAL SPUTTERING YIELDS BY LASER FLUORESCENCE SPECTROSCOPY

被引：3
|
作者：
MATSUDA, Y
YAMAGUCHI, K
KAJIWARA, T
MURAOKA, K
AKAZAKI, M
HONDA, C
OKADA, T
MAEDA, M
YAMAMURA, Y
KAWATOH, E
FUJITA, J
机构：
[1] KYUSHU UNIV,DEPT ELECT ENGN,FUKUOKA 812,JAPAN
[2] OKAYAMA UNIV SCI,DEPT APPL PHYS,OKAYAMA 700,JAPAN
[3] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN
[4] NAGOYA UNIV,INST PLASMA PHYS,CHIKUSA KU,NAGOYA,AICHI 464,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 33卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(88)90618-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：511 / 514
页数：4
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