ELECTRON-BEAM LITHOGRAPHY - A GATING ITEM

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作者：
CLEMENS, JT
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SOLID STATE TECHNOLOGY | 1989年 / 32卷 / 03期
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码：69 / 72
页数：4
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