ION-IMPLANTATION DAMAGE IN CDS

被引:19
|
作者
PARIKH, NR
THOMPSON, DA
CARPENTER, GJC
机构
[1] MCMASTER UNIV,INST MAT RES,HAMILTON L8S 4M1,ONTARIO,CANADA
[2] ENERGY MINES & RESOURCES CANADA,OTTAWA K1A 0G1,ONTARIO,CANADA
来源
关键词
D O I
10.1080/00337578608206119
中图分类号
TL [原子能技术]; O571 [原子核物理学];
学科分类号
0827 ; 082701 ;
摘要
引用
收藏
页码:289 / 300
页数:12
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