SILICON ON INSULATORS - DIFFERENT APPROACHES - A REVIEW

被引:27
|
作者
JASTRZEBSKI, L
机构
关键词
D O I
10.1016/0022-0248(84)90272-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
收藏
页码:253 / 270
页数:18
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