SILICON FROM MICROWAVE PLASMAS - OPTICAL-PROPERTIES AND THEIR RELATION TO STRUCTURE

被引:4
|
作者
HERAK, TV
SCHELLENBERG, JJ
SHUFFLEBOTHAM, PK
KAO, KC
CARD, HC
机构
[1] Univ of Manitoba, Winnipeg, Manit,, Can, Univ of Manitoba, Winnipeg, Manit, Can
关键词
The financial support of the Natural Sciences and Engineering Research Council of Canada (NSERC) is gratefully acknowledged;
D O I
10.1016/0022-3093(88)90424-3
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:125 / 130
页数:6
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