CHLORINE IMPLANTATION INTO AMORPHOUS-GERMANIUM

被引：2
|
作者：
PREMACHANDRAN, V
GUHA, S
SHARMA, RP
KURUP, MB
机构：
来源：
THIN SOLID FILMS | 1982年 / 88卷 / 04期
关键词：
D O I：
10.1016/0040-6090(82)90171-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：335 / 338
页数：4
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