WORK-FUNCTIONS OF THIN LAB6 FILMS

被引:42
|
作者
YUTANI, A
KOBAYASHI, A
KINBARA, A
机构
[1] Department of Applied Physics, the University of Tokyo, Bunkyo-ku, Tokyo, 113
关键词
D O I
10.1016/0169-4332(93)90612-F
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
LaB6 thin films were prepared at elevated temperatures by electron beam deposition in vacuum and were stabilized by annealing at 1100 K for 60 min. Their electron emission characteristics were investigated by the thermionic emission method. The work functions of the films fabricated at 300, 750 and 1000 K had values of 2.7-2.8 eV. The work functions of the films formed on tilted substrates (45-degrees and 80-degrees to the normal direction) at 750 K were also measured. and they had values of approximately 2.7 eV. X-ray diffraction peak positions showed that stress in the films changes from tensile to compressive with increasing substrate tilt angle, and at 45-degrees it is nearly zero. It is found that substrate temperature and film strain have little influence on the work function.
引用
收藏
页码:737 / 741
页数:5
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