ELECTRON-BEAM INDUCED DAMAGE ON PASSIVATED METAL-OXIDE SEMICONDUCTOR-DEVICES

被引：0

作者：

GORLICH, S ^{[1
]}

KUBALEK, E ^{[1
]}

机构：

[1] UNIV DUISBURG GESAMTHSCH,FACHGEBIET WERKSTOFFE ELEKTROTECH,D-4100 DUISBURG 1,FED REP GER

来源：

SCANNING ELECTRON MICROSCOPY | 1985年

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D O I：

暂无

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：87 / 95

页数：9

共 50 条

[1] BIBLIOGRAPHY ON ELECTRON-BEAM INDUCED CURRENT ANALYSIS OF SEMICONDUCTOR-DEVICES
LEEDY, KO
SOLID STATE TECHNOLOGY, 1977, 20 (02) : 45 - 48
[2] ELECTRON-BEAM TEST ON POWER SEMICONDUCTOR-DEVICES
STECK, M
HERRMANN, KD
KUBALEK, E
SCANNING, 1988, 10 (04) : 147 - 152
[3] PULSED ELECTRON-BEAM PROCESSING OF SEMICONDUCTOR-DEVICES
GREENWALD, AC
LITTLE, RG
SOLID STATE TECHNOLOGY, 1979, 22 (04) : 143 - 148
[4] USE OF AN ELECTRON-BEAM TO SEPARATE SEMICONDUCTOR-DEVICES WITH BEAM LEADS
BARYCKA, I
BORATYNSKI, B
OHLY, T
SZRETER, M
TETERYCZ, H
IKANOWICZ, O
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (02) : 480 - 483
[5] AN ELECTRON-BEAM APPARATUS FOR SOLDERING THE COMPONENTS OF SEMICONDUCTOR-DEVICES
KOMOV, AN
KOLPAKOV, AI
BONDAREVA, NI
ZAKHARENKO, VV
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1984, 27 (05) : 1286 - 1288
[6] ELECTRON-BEAM PROGRAMMING AND TESTING OF COMPLEMENTARY METAL-OXIDE SEMICONDUCTOR SYSTEMS
LYSZCZARZ, TM
OLIVER, S
FRIED, J
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 97 - 101
[7] QUANTITATIVE INVESTIGATIONS IN SEMICONDUCTOR-DEVICES BY ELECTRON-BEAM INDUCED CURRENT MODE - A REVIEW
BRESSE, JF
SCANNING ELECTRON MICROSCOPY, 1982, : 1487 - 1500
[8] OXIDE CHARGE ACCUMULATION IN METAL-OXIDE SEMICONDUCTOR-DEVICES DURING IRRADIATION
LEE, DS
CHAN, CY
JOURNAL OF APPLIED PHYSICS, 1991, 69 (10) : 7134 - 7141
[9] ALL-LEVEL ELECTRON-BEAM LITHOGRAPHY FOR TRENCH ISOLATED NANO-METAL OXIDE SEMICONDUCTOR-DEVICES
PERERA, AH
KRUSIUS, JP
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 1343 - 1347
[10] EFFECTS OF ELECTRON-BEAM TESTING ON THE SHORT CHANNEL METAL-OXIDE SEMICONDUCTOR CHARACTERISTICS
MIYOSHI, M
ISHIKAWA, M
OKUMURA, K
SCANNING ELECTRON MICROSCOPY, 1982, : 1507 - 1514

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