INTERNATIONAL STANDARDS FOR SEMICONDUCTOR-MATERIALS

被引：0
|
作者：
BAYLIES, WA
SCACE, RI
VIEWEGGUTBERLET, F
机构：
[1] ADE CORP,NEWTOWN,MA
[2] NBS,DIV SEMICOND MAT & PROC,WASHINGTON,DC 20234
[3] WACKER CHEMITRON GMBH,BURGHAUSEN,FED REP GER
来源：
ASTM STANDARDIZATION NEWS | 1983年 / 11卷 / 05期
关键词：
D O I：
暂无
中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
引用
收藏
页码：21 / 23
页数：3
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