SOME FACTORS AFFECTING DEPTH PROFILING MEASUREMENTS USING AUGER-ELECTRON SPECTROSCOPY

被引：12

作者：

HOOKER, MP ^{[1
]}

GRANT, JT ^{[1
]}

机构：

[1] UNIVERSAL ENERGY SYST INC,MEDWAY,OH 45341

来源：

SURFACE SCIENCE | 1975年 / 51卷 / 01期

关键词：

D O I：

10.1016/0039-6028(75)90259-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：328 / 332

页数：5

共 50 条

[1] COMPOSITIONAL DEPTH PROFILING BY AUGER-ELECTRON SPECTROSCOPY
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