ION-SENSITIVE MEMBRANES FABRICATED BY THE ION-BEAM TECHNIQUE

被引:25
|
作者
PHAM, MT
HOFFMANN, W
机构
来源
SENSORS AND ACTUATORS | 1984年 / 5卷 / 03期
关键词
D O I
10.1016/0250-6874(84)80012-8
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:217 / 228
页数:12
相关论文
共 50 条
  • [41] ION-BEAM DEPOSITION
    ARMOUR, DG
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4): : 325 - 331
  • [42] ION-BEAM OXIDATION
    HARPER, JME
    HEIBLUM, M
    SPEIDELL, JL
    CUOMO, JJ
    [J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (03): : 446 - 446
  • [43] ION-BEAM SUPERPINCH
    WINTERBERG, F
    [J]. PHYSICAL REVIEW A, 1981, 24 (04): : 2168 - 2173
  • [44] ION-BEAM MICROFABRICATION
    GAMO, K
    [J]. VACUUM, 1993, 44 (11-12) : 1089 - 1094
  • [45] ION-BEAM TEXTURING
    HUDSON, WR
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (01): : 286 - 289
  • [46] ION-BEAM EPIPLANTATION
    THOMAS, GE
    BECKERS, LJ
    VRAKKING, JJ
    DEKONING, BR
    [J]. JOURNAL OF CRYSTAL GROWTH, 1982, 56 (03) : 557 - 575
  • [47] ION-BEAM LITHOGRAPHY
    BROWN, WL
    VENKATESAN, T
    WAGNER, A
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 157 - 168
  • [48] ION-BEAM LITHOGRAPHY
    BROWN, WL
    VENKATESAN, T
    WAGNER, A
    [J]. SOLID STATE TECHNOLOGY, 1981, 24 (08) : 60 - 67
  • [49] ION-BEAM ANALYSIS
    FUJIMOTO, F
    [J]. BUNSEKI KAGAKU, 1991, 40 (11) : 577 - 597
  • [50] ION-BEAM TECHNOLOGY
    HOFKER, WK
    [J]. PHILIPS TECHNICAL REVIEW, 1980, 39 (11): : 320 - 324