SI ION-IMPLANTATION FOR GAAS IC FABRICATION

被引：0
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作者：
YAMAZAKI, H
HONDA, T
ISHII, Y
机构：
来源：
REVIEW OF THE ELECTRICAL COMMUNICATIONS LABORATORIES | 1985年 / 33卷 / 01期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：130 / 135
页数：6
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