DEPOSITION OF ALUMINUM NITRIDE FROM THE GAS-PHASE

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作者：

FUNKE, VF

KOSUKHIN, VV

KLEMENTEV, AA

OLEINIKOV, PP

LYAKOV, DM

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来源：

INORGANIC MATERIALS | 1984年 / 20卷 / 01期

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中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：57 / 60

页数：4

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