NONLINEAR MODEL FOR TEMPORAL EVOLUTION OF STEPPED SURFACES DURING MOLECULAR-BEAM EPITAXY

被引：28
|
作者：
MYERSBEAGHTON, AK [1 ]
VVEDENSKY, DD [1 ]
机构：
[1] UNIV LONDON IMPERIAL COLL SCI & TECHNOL,INTERDISCIPLINARY RES CTR SEMICOND MAT,LONDON SW7 2BZ,ENGLAND
来源：
PHYSICAL REVIEW B | 1990年 / 42卷 / 15期
关键词：
D O I：
10.1103/PhysRevB.42.9720
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A time-dependent, one-dimensional continuum model that includes both adatom diffusion and a nonlinear term for diatomic island formation is derived for describing growth on stepped surfaces. The equations are solved numerically to obtain the time evolution of the step velocity and adatom and island concentrations. Due to inclusion of the nonlinear term, the model reproduces and explains both the transient behavior of reflection high-energy electron-diffraction measurements of molecular-beam-epitaxial growth on stepped surfaces and their dependence on the growth conditions. © 1990 The American Physical Society.
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收藏
页码：9720 / 9723
页数：4
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