PERMEATION OF HYDROGEN INTO SILICON DURING LOW-ENERGY HYDROGEN-ION BEAM BOMBARDMENT

被引：29
|
作者：
HORN, MW [1 ]
HEDDLESON, JM [1 ]
FONASH, SJ [1 ]
机构：
[1] PENN STATE UNIV,ENGN SCI PROGRAM,UNIVERSITY PK,PA 16802
来源：
APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 07期
关键词：
D O I：
10.1063/1.98376
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：490 / 492
页数：3
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