SURFACE AND THIN-FILM ANALYSIS OF SEMICONDUCTOR-MATERIALS

被引：67
|
作者：
HONIG, RE [1 ]
机构：
[1] RCA LABS,PRINCETON,NJ 08540
来源：
THIN SOLID FILMS | 1976年 / 31卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(76)90356-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：89 / 122
页数：34
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