MASS SEPARATION IN A TURBOMOLECULAR PUMP

被引：0
|
作者：
SAWADA, T [1 ]
机构：
[1] INST PHYS & CHEM RES,WAKO,SAITAMA,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年
关键词：
D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1 / 4
页数：4
相关论文
共 50 条
  • [11] INFLUENCE OF CLEARANCES ON TURBOMOLECULAR PUMP PERFORMANCE
    DESIMON, M
    VACUUM, 1990, 41 (7-9) : 2021 - 2024
  • [12] A numerical study of the performance of a turbomolecular pump
    Hwang, YK
    Heo, JS
    KSME INTERNATIONAL JOURNAL, 1997, 11 (01): : 77 - 87
  • [13] Pumping performance analysis on turbomolecular pump
    Hsieh, Fan-Chun
    Lin, Ping-Hung
    Liu, Da-Ren
    Chen, Fong-Zhi
    VACUUM, 2012, 86 (07) : 830 - 832
  • [14] Influence of clearances on turbomolecular pump performance
    De Simon, M., 2021, (41):
  • [15] A numerical study of the performance of a turbomolecular pump
    Young-Kyu Hwang
    Joong-Sik Heo
    KSME International Journal, 1997, 11 : 77 - 87
  • [16] Engineering aspects of turbomolecular pump design
    Hablanian, M. H.
    VACUUM, 2007, 82 (01) : 61 - 65
  • [17] THE TURBOMOLECULAR PUMP IN MOLECULAR-STATE
    ANTONIOU, AG
    VALAMONTES, SE
    PANOS, CN
    VALAMONTES, ES
    VACUUM, 1995, 46 (07) : 709 - 715
  • [18] MAGNETOMOTIVE TURBOMOLECULAR PUMP OF TURBOVAC TYPE
    FRANK, R
    USSELMANN, E
    VAKUUM-TECHNIK, 1976, 25 (05): : 141 - 145
  • [19] A SYSTEM FOR AUTOMATIC VENTILATION OF A TURBOMOLECULAR PUMP
    SAINTGERMAIN, JP
    ABEL, G
    STANSFIELD, BL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (05): : 2391 - 2392
  • [20] Note: Automatic mass-flow configuration method for evaluating turbomolecular pump performance
    Hsieh, Fan-Chun
    Su, Yu-Jen
    Lin, Bing-Hong
    Liu, Da-Ren
    Chen, Fong-Zhi
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (06):
12345