EFFECTS OF ACOUSTIC-WAVE IRRADIATION ON CHEMICAL VAPOR-DEPOSITION

被引：8

作者：

SUGIYAMA, K

KINBARA, K

ITOH, H

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(84)90216-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：257 / 266

页数：10

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[1] UV IRRADIATION EFFECTS ON CHEMICAL VAPOR-DEPOSITION OF SIO2
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[J]. PHYSICS IN TECHNOLOGY, 1979, 10 (04): : 152 - 161
[6] CHEMICAL VAPOR-DEPOSITION OF SUPERCONDUCTORS
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[10] DIAMOND CHEMICAL VAPOR-DEPOSITION
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