MECHANISMS OF DIAMOND CVD

被引：0
|
作者：
BUTLER, JE
WOODIN, RL
机构：
[1] USN,RES LAB,CODE 6174,WASHINGTON,DC 20375
[2] NORTON DIAMOND FILMS,NORTHBOROUGH,MA 01532
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1993年 / 205卷
关键词：
D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：186 / COLL
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