DEVICE FOR MEASURING THE RESISTANCE OF THIN-FILMS

被引：0

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作者：

IVANITSKII, AS

CHASOVITIN, YK

CHKALOV, VG

机构：

来源：

MEASUREMENT TECHNIQUES USSR | 1992年 / 35卷 / 05期

关键词：

D O I：

10.1007/BF00977598

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

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页码：614 / 617

页数：4

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