ZNO THIN-FILMS WITH C-AXIS ORIENTATION PREPARED BY THE ECR MULTIPOLAR PLASMA SPUTTERING METHOD

被引：0
|
作者：
ZHANG, YL
NING, ZY
REN, ZX
机构：
来源：
CHINESE SCIENCE BULLETIN | 1993年 / 38卷 / 20期
关键词：
ZINC OXIDE; ECR MULTIPOLAR PLASMA; SPUTTER; PIEZOELECTRICITY;
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
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页码：1698 / 1702
页数：5
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