Reactive diffusion between monocrystalline 6H-SiC and chromium

被引:7
|
作者
Bhanumurthy, K
SchmidFetzer, R
机构
关键词
chromium; monocrystalline; 6HSiC; diffusion path; stability diagram;
D O I
10.1016/0924-4247(96)80047-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Interface reactions between chromium and monocrystalline 6H-SiC were studied in the temperature range of 1000-1200 degrees C for 24-192 h duration. The reaction layers were characterised by XRD and SEM/EDX techniques. The sequence of reaction layers as observed in the diffusion couples, Cr/Cr23C6/Cr7C3/Cr7C3 + Cr3Si/Cr3Si/Cr5Si3C/SiC, could be related to the isothermal section at 1000 degrees C. A stability diagram was constructed for the Cr-Si-C system at 1000 degrees C, based on the available thermodynamic data by plotting the logarithm of activities of C as a function of relative mole fractions of X(Si) and X(Cr). Based on the thermodynamic calculations and the stability map, interpretations pertaining to the observed diffusion paths are discussed.
引用
收藏
页码:25 / 27
页数:3
相关论文
共 50 条
  • [21] Electron irradiation induced defects in monocrystalline 4H-SiC and 6H-SiC: the influence of the electron energy and doping
    von Bardeleben, HJ
    Canon, JL
    APPLIED SURFACE SCIENCE, 2001, 184 (1-4) : 237 - 241
  • [22] Reactive wetting dynamics on 6H-SiC surface with oxide layer
    Tanaka, Shun-ichiro
    Iwamoto, Chihiro
    AICAM 2005, 2006, 11-12 : 571 - +
  • [23] Laser doping of chromium in 6H-SiC for white light emitting diodes
    Bet, Sachin
    Quick, Nathaniel
    Kar, Aravinda
    JOURNAL OF LASER APPLICATIONS, 2008, 20 (01) : 43 - 49
  • [24] Investigation of Radiation Damage and Diffusion of Xenon Implanted in 6H-SiC
    Thabethe, T. T.
    Hlatswayo, T. T.
    Malherbe, J. B.
    Wendler, E.
    Wesch, W.
    Chakraborty, P.
    da Silveira, E. F.
    PROCEEDINGS OF SAIP2012: THE 57TH ANNUAL CONFERENCE OF THE SOUTH AFRICAN INSTITUTE OF PHYSICS, 2012, : 228 - 232
  • [25] The monolithic integration of 6H-SiC electronics with 6H-SiC MEMS for harsh environment applications
    Hailu, E
    Atwell, AR
    Duster, JS
    Li, C
    Balseanu, M
    Kornegay, KT
    NANOTECH 2003, VOL 1, 2003, : 270 - 271
  • [26] 6H-SiC reactive ion etching conditions for the fabrication of semiconductor devices
    Yih, PH
    Saxena, V
    Steckl, AJ
    SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 621 - 624
  • [27] Reactive ion etching of 6H-SiC using NF3
    Casady, JB
    Luckowski, ED
    Bozack, M
    Sheridan, D
    Johnson, RW
    Williams, JR
    SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 625 - 628
  • [28] SCANDIUM ACCEPTOR IN 6H-SIC
    BALLANDOVICH, VS
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1991, 25 (02): : 174 - 178
  • [29] Ion implantation in 6H-SiC
    Rao, MV
    Nordstrom, D
    Gardner, JA
    Edwards, A
    Roth, EG
    Kelner, G
    Ridgway, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 : 655 - 659
  • [30] Anisotropic oxidation of 6H-SIC
    Christiansen, K
    Helbig, R
    JOURNAL OF APPLIED PHYSICS, 1996, 79 (06) : 3276 - 3281