共 50 条
- [24] Investigation of Radiation Damage and Diffusion of Xenon Implanted in 6H-SiC PROCEEDINGS OF SAIP2012: THE 57TH ANNUAL CONFERENCE OF THE SOUTH AFRICAN INSTITUTE OF PHYSICS, 2012, : 228 - 232
- [25] The monolithic integration of 6H-SiC electronics with 6H-SiC MEMS for harsh environment applications NANOTECH 2003, VOL 1, 2003, : 270 - 271
- [26] 6H-SiC reactive ion etching conditions for the fabrication of semiconductor devices SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 621 - 624
- [27] Reactive ion etching of 6H-SiC using NF3 SILICON CARBIDE AND RELATED MATERIALS 1995, 1996, 142 : 625 - 628
- [29] Ion implantation in 6H-SiC NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 : 655 - 659