REACTIVE SPUTTERING OF THIN-FILMS AND INVESTIGATION OF THEIR PROPERTIES

被引：0
|
作者：
REICHELT, K
机构：
来源：
VACUUM | 1984年 / 34卷 / 12期
关键词：
D O I：
10.1016/0042-207X(84)90226-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：1067 / 1067
页数：1
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