FIELD-ASSISTED ION-EXCHANGE FOR THE DETECTION OF LOCALIZED DEFECTS IN THIN-FILMS ON GLASS SUBSTRATES

被引：5
|
作者：
PANTCHEV, BG
DANESH, P
机构：
来源：
THIN SOLID FILMS | 1988年 / 161卷
关键词：
D O I：
10.1016/0040-6090(88)90238-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：85 / 91
页数：7
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