FIELD-ASSISTED ION-EXCHANGE FOR THE DETECTION OF LOCALIZED DEFECTS IN THIN-FILMS ON GLASS SUBSTRATES

被引：5

|

作者：

PANTCHEV, BG

DANESH, P

机构：

来源：

THIN SOLID FILMS | 1988年 / 161卷

关键词：

D O I：

10.1016/0040-6090(88)90238-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：85 / 91

页数：7

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