AUTOMATIC CONTROL SYSTEM FOR ELECTRON BEAM MICROMACHINING APPARATUS

被引：0
|
作者：
NAMBA, S
WATANABE, K
GOTHO, E
NISHI, K
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1964年 / 111卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C67 / C67
页数：1
相关论文
共 50 条
  • [31] Closed-loop automatic feedback control in electron beam melting
    Jorge Mireles
    Cesar Terrazas
    Sara M. Gaytan
    David A. Roberson
    Ryan B. Wicker
    The International Journal of Advanced Manufacturing Technology, 2015, 78 : 1193 - 1199
  • [32] Numerical simulations of the thermionic electron gun for electron-beam welding and micromachining
    Jansky, Pavel
    Zlamal, Jakub
    Lencova, Bohumila
    Zobac, Martin
    Vlcek, Ivan
    Radlicka, Tomas
    VACUUM, 2009, 84 (02) : 357 - 362
  • [33] Electron-beam irradiation of porous silicon: Application to micromachining
    Borini, S
    Amato, G
    Rocchia, M
    Boarino, L
    Rossi, AM
    JOURNAL OF APPLIED PHYSICS, 2003, 93 (08) : 4439 - 4441
  • [34] Electron beam irradiation of porous silicon for application in micromachining and sensing
    Borini, S
    Rocchia, M
    Rossi, AM
    Boarino, L
    Amato, G
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2005, 202 (08): : 1648 - 1652
  • [35] ELECTRON BEAM IMAGE PROJECTION SYSTEM WITH AUTOMATIC WAFER HANDLING.
    Mori, I.
    Sugihara, K.
    Itoh, C.
    Tabata, M.
    Shinozaki, T.
    Microelectronic Engineering, 1985, 3 (1-4) : 69 - 76
  • [36] Automatic compensation for temperature drift of deflecting output of electron beam system
    Yin, Ming
    Sun, Xiaojun
    Zhang, Yulin
    Weixi Jiagong Jishu/Microfabrication Technology, 1999, (01): : 39 - 43
  • [37] An injector beam automatic shutdown control system based on MCU
    Xu, DC
    Zhou, XJ
    Wen, WX
    Wang, CF
    ICEMI 2005: Conference Proceedings of the Seventh International Conference on Electronic Measurement & Instruments, Vol 2, 2005, : 246 - 249
  • [38] SIMPLE FEEDBACK-SYSTEM FOR USE IN AUTOMATIC-CONTROL OF EXPERIMENTAL APPARATUS
    KOSINA, Z
    CESKOSLOVENSKY CASOPIS PRO FYSIKU SEKCE A, 1974, 24 (01): : 61 - 63
  • [39] APPARATUS ELECTRON-BEAM MICROTOMOGRAPHY IN SEM
    ARISTOV, VV
    RAU, EI
    YAKIMOV, EB
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1995, 150 (01): : 211 - 219
  • [40] AN APPARATUS FOR SPRAY COATING WITH AN ELECTRON BEAM VAPORISER
    MATYUNIN, AS
    KOVALCHU.VS
    AUTOMATIC WELDING USSR, 1967, 20 (03): : 66 - &
12345