DIFFRACTION CHARACTERISTICS OF PHOTORESIST SURFACE-RELIEF GRATINGS

被引：52
|
作者：
MOHARAM, MG [1 ]
GAYLORD, TK [1 ]
SINCERBOX, GT [1 ]
WERLICH, H [1 ]
YUNG, B [1 ]
机构：
[1] IBM CORP,RES LABS,SAN JOSE,CA 95193
来源：
APPLIED OPTICS | 1984年 / 23卷 / 18期
关键词：
D O I：
10.1364/AO.23.003214
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：3214 / 3220
页数：7
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