INTEGRATED-CIRCUIT INSPECTION VIA ACOUSTIC MICROSCOPY

被引：11

|

作者：

WEGLEIN, RD

机构：

来源：

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1983年 / 30卷 / 01期

关键词：

D O I：

10.1109/T-SU.1983.31381

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

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页码：40 / 42

页数：3

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