MOLECULAR-DYNAMICS MODELING OF VAPOR-PHASE AND VERY-LOW-ENERGY ION-BEAM CRYSTAL-GROWTH PROCESSES

被引：37

作者：

DODSON, BW

机构：

[1] Semiconductor Physics Division, Sandia National Laboratories, Albuquerque, New Mexico

来源：

CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES | 1990年 / 16卷 / 02期

关键词：

D O I：

10.1080/10408439008243747

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：115 / 130

页数：16

共 29 条

[1] ION-BEAM-INDUCED EPITAXIAL VAPOR-PHASE GROWTH - A MOLECULAR-DYNAMICS STUDY
MULLER, KH
PHYSICAL REVIEW B, 1987, 35 (15): : 7906 - 7913
[2] THE ROLE OF LOW-ENERGY ION SURFACE INTERACTIONS DURING CRYSTAL-GROWTH FROM THE VAPOR-PHASE
GREENE, JE
JOURNAL OF METALS, 1985, 37 (08): : A22 - A22
[3] VAPOR-PHASE GROWTH OF AMORPHOUS MATERIALS - A MOLECULAR-DYNAMICS STUDY
SCHNEIDER, M
RAHMAN, A
SCHULLER, IK
PHYSICAL REVIEW B, 1986, 34 (03) : 1802 - 1805
[4] MOLECULAR-DYNAMICS SIMULATION OF NONEQUILIBRIUM LOW-ENERGY (1-100-EV) ION-BEAM DEPOSITION PROCESSES
OHASHI, T
MIYAKE, K
OHASHI, K
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 91 (1-4): : 593 - 596
[5] MOLECULAR-DYNAMICS SIMULATIONS OF LOW-ENERGY PARTICLE BOMBARDMENT EFFECTS DURING VAPOR-PHASE CRYSTAL-GROWTH - 10 EVSI ATOMS INCIDENT ON SI(001)2X1 SURFACES
KITABATAKE, M
FONS, P
GREENE, JE
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (05): : 3726 - 3735
[6] A REVIEW OF THE PRESENT UNDERSTANDING OF THE ROLE OF ION SURFACE INTERACTIONS AND PHOTOINDUCED REACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH
GREENE, JE
MOTOOKA, T
SUNDGREN, JE
ROCKETT, A
GORBATKIN, S
LUBBEN, D
BARNETT, SA
JOURNAL OF CRYSTAL GROWTH, 1986, 79 (1-3) : 19 - 32
[7] MOLECULAR-DYNAMICS AND QUASIDYNAMICS SIMULATIONS OF LOW-ENERGY PARTICLE BOMBARDMENT EFFECTS DURING VAPOR-PHASE CRYSTAL-GROWTH - PRODUCTION AND ANNIHILATION OF DEFECTS DUE TO 50 EV SI INCIDENT ON (2 X 1)-TERMINATED SI(001)
KITABATAKE, M
GREENE, JE
JOURNAL OF APPLIED PHYSICS, 1993, 73 (07) : 3183 - 3194
[8] ION SURFACE INTERACTIONS DURING VAPOR-PHASE CRYSTAL-GROWTH BY SPUTTERING, MBE, AND PLASMA-ENHANCED CVD - APPLICATIONS TO SEMICONDUCTORS
GREENE, JE
BARNETT, SA
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02): : 285 - 302
[9] APPLICATIONS OF MOLECULAR-DYNAMICS METHODS TO LOW-ENERGY ION-BEAMS AND FILM DEPOSITION PROCESSES
GILMER, GH
ROLAND, C
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1994, 130 : 321 - 343
[10] Molecular-dynamics simulations for low energy ion beam thin film formation process at different incident beam energy and substrate temperature
Kawakubo, T.
Proceedings of the International Conference and Exhibition on Computer Applications to Materials Science and Engineering, 1991,

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