DETERMINATION OF SURFACE-ROUGHNESS AND OPTICAL-CONSTANTS OF INHOMOGENEOUS AMORPHOUS-SILICON FILMS

被引：718

|

作者：

SWANEPOEL, R

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1984年 / 17卷 / 10期

关键词：

D O I：

10.1088/0022-3735/17/10/023

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

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页码：896 / 903

页数：8

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