CONSEQUENCE OF ILLUMINATION WAVE ON OPTICAL FUNCTION OF NONPERIODIC DIFFRACTIVE ELEMENTS

被引:7
|
作者
AAGEDAL, H [1 ]
TEIWES, S [1 ]
WYROWSKI, F [1 ]
机构
[1] BERLIN INST OPT,D-12484 BERLIN,GERMANY
关键词
D O I
10.1016/0030-4018(94)90732-3
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Non-periodic diffractive elements may be used to generate a specified light distribution as the diffraction pattern. The illumination wave has a severe influence on the optical function of the DE. First steps on the analysis of this situation are performed for coherent and incoherent illumination. In the coherent case, an iterative algorithm is introduced.
引用
收藏
页码:22 / 28
页数:7
相关论文
共 50 条
  • [1] BINARIZATION OF DIFFRACTIVE ELEMENTS WITH NONPERIODIC STRUCTURES
    BRAUER, R
    WYROWSKI, F
    BRYNGDAHL, O
    APPLIED OPTICS, 1992, 31 (14) : 2535 - 2540
  • [2] Wave modelling of diffractive optical elements
    CLOSPI-Bulgarian Acad of Sciences, Sofia, Bulgaria
    J Mod Opt, 7 (1399-1408):
  • [3] Wave modelling of diffractive optical elements
    Kovatchev, M
    Ilieva, R
    JOURNAL OF MODERN OPTICS, 1996, 43 (07) : 1399 - 1408
  • [4] Vector iterative algorithm for the design of diffractive optical elements applied to uniform illumination
    Zhao, YQ
    Li, YP
    Zhou, QG
    OPTICS LETTERS, 2004, 29 (07) : 664 - 666
  • [5] Fabrication error analysis for diffractive optical elements used in a lithography illumination system
    Wang, Jian
    Zhang, Fang
    Song, Qiang
    Zeng, Aijun
    Zhu, Jing
    Huang, Huijie
    OPTICAL ENGINEERING, 2015, 54 (04)
  • [6] Design of diffractive optical elements for off-axis illumination in projection lithography
    State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
    Guangxue Jingmi Gongcheng, 2008, 11 (2081-2086):
  • [7] Spectral resolution of optical filters based on diffractive optical elements with non-uniform illumination
    Angelskar, Hallvard
    Sudbo, Aasmund S.
    JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 2008, 3
  • [8] Ray tracing and wave aberration calculation for diffractive optical elements
    Wang, YT
    Zhang, SJ
    Macdonald, J
    OPTICAL ENGINEERING, 1996, 35 (07) : 2021 - 2025
  • [9] Uniformity of reshaped beam by diffractive optical elements with light-emitted diode illumination
    Chen, Mengzhu
    Gu, Huarong
    Wang, Qixia
    Tan, Qiaofeng
    AOPC 2015: MICRO/NANO OPTICAL MANUFACTURING TECHNOLOGIES; AND LASER PROCESSING AND RAPID PROTOTYPING TECHNIQUES, 2015, 9673
  • [10] Spatial frequency spectrum optimization method for design of diffractive optical elements in uniform illumination
    Department of Physics, University of Science and Technology of China, Hefei 230026, China
    Zhongguo Jiguang/Chinese Journal of Lasers, 2007, 34 (10): : 1388 - 1392