共 50 条
- [6] Design of diffractive optical elements for off-axis illumination in projection lithography Guangxue Jingmi Gongcheng, 2008, 11 (2081-2086):
- [7] Spectral resolution of optical filters based on diffractive optical elements with non-uniform illumination JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS, 2008, 3
- [9] Uniformity of reshaped beam by diffractive optical elements with light-emitted diode illumination AOPC 2015: MICRO/NANO OPTICAL MANUFACTURING TECHNOLOGIES; AND LASER PROCESSING AND RAPID PROTOTYPING TECHNIQUES, 2015, 9673
- [10] Spatial frequency spectrum optimization method for design of diffractive optical elements in uniform illumination Zhongguo Jiguang/Chinese Journal of Lasers, 2007, 34 (10): : 1388 - 1392