REMOTE PLASMA-ASSISTED OXIDATION OF INP

被引：0

作者：

LEE, JI

KANG, KN

BAGLIO, JA

LIM, HJ

PARK, HL

机构：

[1] GTE LABS INC, WALTHAM, MA 02254 USA

[2] AJOU UNIV, DEPT ELECTR ENGN, SUWON 440749, SOUTH KOREA

[3] YONSEI UNIV, DEPT PHYS, SEOUL 120749, SOUTH KOREA

来源：

关键词：

D O I：

10.1007/BF00721839

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1043 / 1045

页数：3

共 50 条

[31] PLASMA-ASSISTED ETCHING IN MICROFABRICATION
COBURN, JW
WINTERS, HF
[J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1983, 13 : 91 - 116
[32] PLASMA-ASSISTED DECOMPOSITION OF TRIMETHYLARSINE
PIHLSTROM, BG
SHENG, TY
YU, Z
COLLINS, GJ
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 70 (06) : 3329 - 3332
[33] Plasma-Assisted Microcontact Printing
Chang, Bingdong
Zhao, Ding
Sun, Hongyu
[J]. ACS APPLIED MATERIALS & INTERFACES, 2022, 14 (20) : 23944 - 23950
[34] Plasma-assisted ignition and combustion
Starikovskiy, Andrey
Aleksandrov, Nickolay
[J]. PROGRESS IN ENERGY AND COMBUSTION SCIENCE, 2013, 39 (01) : 61 - 110
[35] Kinetics of plasma-assisted boriding
Filep, E
Farkas, S
[J]. SURFACE & COATINGS TECHNOLOGY, 2005, 199 (01): : 1 - 6
[36] PLASMA-ASSISTED NITRIDING OF ALUMINUM
CHEN, HY
STOCK, HR
MAYR, P
[J]. SURFACE & COATINGS TECHNOLOGY, 1994, 64 (03): : 139 - 147
[37] Plasma-Assisted Reforming of Methane
Feng, Jiayu
Sun, Xin
Li, Zhao
Hao, Xingguang
Fan, Maohong
Ning, Ping
Li, Kai
[J]. ADVANCED SCIENCE, 2022, 9 (34)
[38] PLASMA-ASSISTED ETCHING OF PAPER
SAPIEHA, S
WROBEL, AM
WERTHEIMER, MR
[J]. PLASMA CHEMISTRY AND PLASMA PROCESSING, 1988, 8 (03) : 331 - 346
[39] MECHANISMS IN PLASMA-ASSISTED ETCHING
COBURN, JW
[J]. PHYSICA SCRIPTA, 1988, T23 : 258 - 263
[40] Progress on hydrogen sulfide removal: From catalytic oxidation to plasma-assisted treatment
Wang, Shengfei
Rohani, Vandad
Leroux, Patrick
Gracian, Catherine
Nastasi, Valerie
Fulcheri, Laurent
[J]. Chemosphere, 2024, 364