REMOTE PLASMA-ASSISTED OXIDATION OF INP

被引：0
|
作者：
LEE, JI
KANG, KN
BAGLIO, JA
LIM, HJ
PARK, HL
机构：
[1] GTE LABS INC, WALTHAM, MA 02254 USA
[2] AJOU UNIV, DEPT ELECTR ENGN, SUWON 440749, SOUTH KOREA
[3] YONSEI UNIV, DEPT PHYS, SEOUL 120749, SOUTH KOREA
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1991年 / 10卷 / 17期
关键词：
D O I：
10.1007/BF00721839
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：1043 / 1045
页数：3
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