CHEMICALLY ENHANCED ION ETCHING ON REFRACTORY-METAL SILICIDES

被引：7

作者：

OBRIEN, WL

RHODIN, TN

RATHBUN, LC

机构：

[1] CORNELL UNIV,SCH APPL & ENGN PHYS,ITHACA,NY 14853

[2] CORNELL UNIV,NATL NANOFABRICAT FACIL,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575709

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1384 / 1387

页数：4

共 50 条

[21] EXPERIMENTAL AND THEORETICAL BAND-STRUCTURE STUDIES OF REFRACTORY-METAL SILICIDES
WEAVER, JH
MORUZZI, VL
SCHMIDT, FA
PHYSICAL REVIEW B, 1981, 23 (06): : 2916 - 2922
[22] QUANTITATIVE-ANALYSIS OF CHEMICAL VAPOR-DEPOSITION REFRACTORY-METAL SILICIDES
STREIT, LA
WILLIAMS, P
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1979 - 1983
[23] COMPOUND SPUTTERING CATHODES OF REFRACTORY-METAL SILICIDES AND THIN-FILM PRODUCED
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AVINS, JB
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[24] REFRACTORY-METAL SILICIDE FORMATION BY ION-IMPLANTATION
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CHIANG, SW
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REIHL, RF
THIN SOLID FILMS, 1980, 74 (02) : 239 - 244
[25] COMPARISON OF ACCURACY OF VARIOUS AES METHODS FOR QUANTITATIVE-ANALYSIS OF REFRACTORY-METAL SILICIDES
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[26] INFLUENCE OF PARTICLE BOMBARDMENT ON MICROSTRUCTURE AND INTERNAL-STRESSES OF REFRACTORY-METAL SILICIDES ON SILICON
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ULLMAIER, H
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[27] ABOUT THE TEMPERATURE-DEPENDENCE OF YIELD STRESSES OF REFRACTORY-METAL SILICIDES AND OF OTHER MATERIALS
OSIPOV, AD
UKRAINSKII FIZICHESKII ZHURNAL, 1993, 38 (12): : 1806 - 1811
[28] REFRACTORY-METAL FOR LSI
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DENKI KAGAKU, 1989, 57 (01): : 8 - 13
[29] REFRACTORY-METAL SILICIDE FORMATION BY SPUTTERING A REFRACTORY-METAL ON HEATED SI SUBSTRATES
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[30] SILICIDES FORMATION FOR REFRACTORY-METAL ALLOYS (TA-V AND TI-V) ON SI
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JOURNAL OF APPLIED PHYSICS, 1984, 56 (08) : 2341 - 2345

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