NB3SN THIN-FILMS MADE BY RF MAGNETRON SPUTTERING PROCESS WITH A NB3SN SINGLE TARGET FOR FRS (FIBER-REINFORCED SUPERCONDUCTOR)

被引：0

作者：

AGATSUMA, K ^{[1
]}

TATEISHI, H ^{[1
]}

ARAI, K ^{[1
]}

SAITOH, T ^{[1
]}

SADAKATA, N ^{[1
]}

NAKAGAWA, M ^{[1
]}

机构：

[1] FUJIKURA CO LTD,KOHTOH KU,TOKYO,JAPAN

来源：

CRYOGENICS | 1994年 / 34卷

关键词：

D O I：

10.1016/S0011-2275(05)80199-7

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

We have been developing a high-field pulsed superconductor with a high elastic modulus fiber for reinforcement called FRS (Fiber Reinforced Superconductor). This FRS will be performed by magnetron sputtering techniques of two opposed planar targets in future. In this process for a Nb3Sn single material target would be desired to be developed to shorten the deposition process. We have succeeded in making a sputtering target which consists of Nb3Sn single material. The target is made from the reacted Nb3Sn powder. Nb3Sn thin films on MgO substrate were made using this target.

引用

页码：847 / 850

页数：4

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