COMPARATIVE OXIDATION STUDIES OF SIC(0001) AND SIC(0001) SURFACES

被引：78
|
作者：
MUEHLHOFF, L [1 ]
BOZACK, MJ [1 ]
CHOYKE, WJ [1 ]
YATES, JT [1 ]
机构：
[1] UNIV PITTSBURGH,CTR SURFACE SCI,DEPT CHEM,PITTSBURGH,PA 15260
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 07期
关键词：
D O I：
10.1063/1.337121
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2558 / 2563
页数：6
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