QUANTUM-WELL INTERMIXING

被引:287
|
作者
MARSH, JH
机构
[1] Dept. of Electron. and Electr. Eng., Glasgow Univ.
关键词
D O I
10.1088/0268-1242/8/6/022
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Intermixing the wells and barriers of quantum well structures generally results in an increase in the bandgap and is accompanied by changes in the refractive index. A range of techniques, based on impurity diffusion, dielectric capping and laser annealing, has been developed to enhance the quantum well intermixing (QWI) rate in selected areas of a wafer; such processes offer the prospect of a powerful and relatively simple fabrication route for integrating optoelectronic devices and for forming photonic integrated circuits (PICS). Recent progress in QWI techniques is reviewed, concentrating on processes which are compatible with PIC applications, in particular the achievement of low optical propagation losses.
引用
收藏
页码:1136 / 1155
页数:20
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